The history of this department was started at National project to establish Diploma III program of chemical engineering field as a part of Non-Degree Technology Faculty (FNGT), Institut Teknologi Sepuluh Nopember (ITS) at 1985. Based on decree of ministry of education and culture Number : : 1312/O/1991 about dissolution of Non-Degree Technology Faculty (FNGT), Institut Teknologi Sepuluh Nopember (ITS). Diploma III program integrated to Chemical Engineering Department, Faculty of Industral Technology. This integration did not change the objective of this department,  to fulfil the needs of vocational staff or professional technical staff on chemical industries. After 26 years under Faculty of Industrial Technology, Diploma III of Chemical Engineering program together with the others diploma III program of ITS, merged together under Vocational Studies Faculty, ITS at 2017.

In 2019, Diploma III program of industrial Chemical engineering with the other diploma program that affiliated to Faculty of Vocational Studies transformed into applied undergraduate (Diploma IV) program. This program prepared graduates which has expertise on Advanced Process Engineering Technology.